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Semi-Gas® Systems

Gas Distribution Products

Gas Distribution Systems: Centurion Gas Cabinets, Gas Panels, Valve Manifold Boxes, Programmable Logic Controller
Gas Distribution Systems:
CenturionTM Gas Cabinet
Valve Manifold Boxes
PLC Controller
UHP Manufacturing:
OEM Gas Panels
Support of Installed Equipment

Valve Manifold Boxes
Fully Automatic Surface Mount Design
Only 16 Inches Wide

Centurion valve manifold box, fully automatic Surface Mount VMB

Valve Manifold Boxes
Fully Automatic Conventional Design

Fully automatic valve manifold box, Conventional VMB

Valve Manifold Box

With ever smaller line width challenges in the electronics industries, gas purity is paramount. The CENTURIONTM Valve Manifold Boxes (VMB) represent the next generation of ultra pure gas source manifolds designed specifically for use in submicron fabrication environments.

Utilizing springless diaphragm valves, pressure transducers, and tied diaphragm regulators, the CENTURIONTM Valve Manifold Box is engineered to eliminate contamination of the source supply of specialty gases. An in-line architecture, unique to Semi-Gas®, and a compact modular design reduce the dead space volume compared to other high-purity valve manifold configurations.

The result is a valve manifold with excellent purge efficiency providing maximum protection for both your operations and your processes.

The CENTURIONTM Valve Manifold design is ideal for supplying specialty gases to process tools that manufacture the most challenging nanotechnology applications. The system is available in a variety of process-specific configurations.

  • Auto-Purge Valve Manifolds designed for flammable, toxic, pyrophoric or corrosive HPM gases.
  • Safety protected manual manifolds with Emergency Shutoff.
  • Manual and Auto-Purge Valve manifolds for inert process gases.
    • E-STOP:
      • SGS 6000 DE
    • Semi Automatic VMB
    • Fully Automatic VMB
      • Conventional
      • Surface Mount

Fully Automatic VMB
Surface Mount Design

  • 4,6 or 8 Process Lines Out
  • Full Cycle Purge Routines
  • Fully Loaded Stick Designs
    • Manual LOTO
    • HPI
    • PGI
    • Regulator
    • EFS
    • Filter
    • LPV
    • LPI
  • Touch Screen PLC Controlled
    • Control at Bottom
    • Screen in door
    • Tilt up to 45 degrees
    • 7.4 inch monochrome

Fully Automatic VMB
Conventional Design

  • 4, 6 or 8 Process Lines Out
  • Full Cycle Purge Routines
  • Fully Loaded Stick Designs
  • Touch Screen PLC Controlled
    • Control at Bottom
    • Screen in door
    • 12 inch full color
  • Movable Screen
    • Place in any window
    • Dependent upon height
    • SEMI - S8 requirements 38 to 50 inches high