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- Provides a Continuous Flow of Controller Gas Mixtures
- Uniform Mixing for User Specified Concentrations
- Analog MFC Blending System
- Ultra-High Purity Orbital Welded Components
- PLC Based Control System Including PC
- Intuitive Operating Interface and Control
- Continuously Monitors System Conditions for Alarms
- Includes Pneumatically Operated Valves
- Assembled in a Class 100 Cleanroom Environment
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- Dimensions: 44" T x 82" W x 14" D
- Weight: 550 lbs
- Air Flow Requirements: 200 SCFM
- Exhaust Duct: 6" Diameter
- Voltage: 100 to 240 VAc, 1 Phase
- Frequency: 50 to 60 Hz
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- Welded 11 ga Steel Enclosure
- Self-Closing and Self-Latching Enclosure Door
- Self-Closing and Lockable Controller Enclosure
- UL Approved Fire Sprinkler
- 1/4" thick Safety Glass Window
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SEMI-GAS® is a registered trademark of Applied Energy Systems, Inc.
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