CenturionTM Gas Panels
Best Value in the Market
CenturionTM Gas Panel
Semi-Gas® Systems pioneered specialty gas handling technology over 20 years ago. Today, these gas panels and valve manifold boxes continue to deliver the safety, performance and reliability required in the most advanced semiconductor production and R&D environments.
In the field, Semi-Gas® gas panels have the best reliability record in the industry. Components are clearly labeled and easily accessible from the front panel for improved serviceability. In addition, the modular gas panel design reduces spare part stocking requirements and makes adding options easy.
Features and Benefits
- Compact and efficient internal flow path minimizes dead space for consistent, repeatable, high purity operation
- Automatic switchover capability provides critical redundancy and guaranteed uptime
- Vacuum venturi-assisted purging provides quick and efficient evacuation of the manifold
- Front removable components simplify maintenance
- Continuous purge gas bleed during cylinder changes prevents atmospheric contamination of the pigtail
- Modular design reduces lead times and spare part stocking requirements and makes adding options easy
- Leak tested and certified
- Isolated electronic components
- All orbital automated butt-welded construction
- Opposing pigtail brackets to prevent the transmission of force to the VCR connection
- Excess flow protection
- Emergency shutoff valve (ESO) for all HPM applications
- Intuitive designs reduce the potential for operator error
- Auto-purge Manifolds designed for flammable, toxic, pyrophoric or corrosive HPM gases
- Safety protected manual manifolds with Emergency Shutoff features for lower cost HPM applications
- Manual and Auto-purge Manifolds for inert process gases
- State of the Art configurable software