SEMI-GAS^® Systems - Ultra High Purity Gas Source, Gas Distribution and Gas Control Systems include: Centurion™ Gas Cabinets, Centurion™ Gas Panels, Nanoturion™ Valve Manifold Boxes, Megaturion™ Bulk Specialty Gas Systems, Xturion™ Custom Gas Equipment and GigaGuard™ Controller Systems.

SEMI-GAS^® Systems gas panels, cabinet enclosures and valve manifold boxes are engineered to deliver the performance required in the manufacturing of the most advanced electronic devices. Whether the gas is toxic, flammable, corrosive or inert, the SEMI-GAS^® Systems gas distribution system will deliver the highest process purity, improve product performance and reduce the overall cost of ownership.
SEMI-GAS^® Systems has one of the largest installed bases of gas handling equipment worldwide.

SEMI-GAS^® Systems gas distribution panels, valve manifold boxes and cabinet enclosures are engineered for long term performance. As part of a comprehensive quality assurance program, each panel is rigorously tested for proper performance, first at the component level, then on the panel, and finally after installation into the cabinet

Reliability Data:
  SEMI S2 Compliant Gas Cabinet
  Uptime - 99.99+%
  MTTR - 2.3 hours .

SEMI-GAS^® Systems gas panels, cabinet enclosures and valve manifold boxes are available in standard designs to promote the safe handling and control of hazardous materials. Recognizing that many of our customers needs are unique and cannot be accommodated by a standard product, SEMI-GAS^® Systems experience allows us to provide customized systems tailored to meet each customer's individual process requirements whenever the application arises. Many complex gas distribution and containment applications can be simply addressed through modifying our standard products to provide a custom solution.